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Title:
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Electrothermally actuated RF MEMS switches suspended on a low-resistivity substrate
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Author:
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Girbau Sala, David; Pradell i Cara, Lluís; Lázaro Guillén, Antoni; Nebot Serra, Àlvar
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Other authors:
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Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions; Universitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones |
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Abstract:
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This paper presents an electrothermally actuated lateral resistive-contact switch for application to low-gigahertz-band communication systems. It was manufactured on a standard low-resistivity substrate, and its RF performance was improved by suspending the structures 25 μm from the substrate, which is a strategy for future integration with active devices in the system-on-chip concept. Measured insertion losses are−0.26 dB at 1 GHz and −0.65 dB at 6 GHz, return losses are −29 dB at 1 GHz and −25 dB at 6 GHz, and isolations are −52 dB at 1 GHz and −26 dB at 6 GHz. The device is driven by a metal electrothermal actuator, which achieves large displacements and contact forces at much lower temperatures than traditional polysilicon electrothermal actuators. The RF power handling characteristics are also addressed and measured. |
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Abstract:
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Peer Reviewed |
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Subject(s):
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-Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
-Microelectromechanical systems
-microwave switches
-microswitches
-loss -0.26 dB
-loss -0.65 dB
-loss -29 dB
-loss -25 dB
-frequency 1 GHz
-frequency 6 GHz
-electrothermally actuated RF MEMS switches
-low-resistivity substrate
-electrothermally actuated lateral resistive-contact switch
-low-gigahertz-band communication systems
-system-on-chip concept
-metal electrothermal actuator
-contact forces
-polysilicon electrothermal actuators
-RF power handling characteristics
-microelectromechanical systems switch
-Sistemes microelectromecànics |
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Rights:
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Document type:
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Article |
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Published by:
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IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
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