Title:
|
Control of MEMS vibration modes with pulsed digital oscillators: part I—theory
|
Author:
|
Blokhina, Elena; Pons Nin, Joan; Ricart Campos, Jordi; Feely, Orla; Domínguez Pumar, Manuel
|
Other authors:
|
Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
Abstract:
|
The aim of this paper is to show that it is possible
to excite selectively different mechanical resonant modes of a
MEMS structure using pulsed digital oscillators (PDOs). This
can be done by simply changing the working parameters of the
oscillator, namely its sampling frequency or its feedback filter. A
set of iterative maps is formulated to describe the evolution of the
spatial modes between two sampling events in PDOs. With this
lumped model, it is established that under some circumstances
PDO bitstreams related to only one of the resonances can be
obtained, and that in the anti-oscillation regions of the PDO
the mechanical energy is absorbed into the electrical domain on
average. The possibility of selecting for a given resonant frequency
the oscillation and anti-oscillation behavior allows one to obtain
oscillations at any given resonant mode of the MEMS structure. |
Subject(s):
|
-Àrees temàtiques de la UPC::Enginyeria de la telecomunicació -Energy efficiency series -Signal theory (Telecommunication) -Microelectromechanical systems -Microresonators (Optoelectronics) -Energia -- Estalvi -Senyal, Teoria del (Telecomunicació) |
Rights:
|
|
Document type:
|
Article - Published version Article |
Share:
|
|