Template fabrication of 3D metallic microstructures by electrochemical etching and electroplanting

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Title:	Template fabrication of 3D metallic microstructures by electrochemical etching and electroplanting
Author:	Hernández Díaz, David; Lange, Diego; Todorov Trifonov, Trifon; Garin Escriva, Moises; García Molina, Francisco Miguel; Rodríguez Martínez, Ángel; Alcubilla González, Ramón
Other authors:	Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
Abstract:	In this work, we show that macroporous silicon consisting of periodic arrays of etched pores is a feasible alternative for synthesis of 2D and 3d metallic microstructures due to its flexibility in the definition of complex geometries bulk. In addition macroporous silicon features full three-dimensionality, well controlled pore distribution and growth, and scalable dimensions (0.5-100 μm). We present here the fabrication of 3D Ni micro-structures by electroplating of macroporous silicon templates. The given approach can be applied for depositions of different metals and in more complicated template-structures.
Abstract:	Peer Reviewed
Subject(s):	-Àrees temàtiques de la UPC::Energies::Recursos energètics renovables -Nanotechnology -- Research -3D metallic microstructures -Nanotecnologia -- Investigació
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Document type:	Article - Published version Conference Object
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