A self-test and dynamics characterization circuit for MEMS electrostatic actuators

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Title:	A self-test and dynamics characterization circuit for MEMS electrostatic actuators
Author:	Fernández Martínez, Daniel; Madrenas Boadas, Jordi; Cosp Vilella, Jordi
Other authors:	Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. AHA - Arquitectures Hardware Avançades
Abstract:	This paper presents a high-bandwidth capacitance estimation and driving circuit especially tailored for its use with MEMS electrostatic actuators. The circuit can be integrated as a part of a system comprising an electrostatic actuator to provide self-testing and failure prediction capabilities and also as a simple and low-cost actuator dynamics characterization system capable of measuring both periodic and nonperiodic movements.
Abstract:	Peer Reviewed
Subject(s):	-Àrees temàtiques de la UPC::Informàtica::Hardware -MEMS -Microelectromechanical systems -Actuators -- Design and construction -Electrostatic actuators -Sistemes microelectromecànics -Actuadors
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Document type:	Article - Published version Article
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