Title:
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Microelectromechanical resonators based on an all polymer/carbon nanotube composite structural material
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Author:
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Sousa, P.M.; Gutierrez, M.; Mendoza Gómez, Ernesto; Llobera, A.; Chu, V.; Conde, J.P.
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Abstract:
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Carboxylated multi-wall carbon-nanotubes (CNTs) monolayers are integrated on microfabricated all-polymer micro-electromechanical systems (pMEMS) resonator bridges on glass substrates. The structural layer of the MEMS bridges is a multilayer blended conductive polymer based on
poly(3,4-ethylenedioxythiophene):poly (styrenesulfonate) (PEDOT:PSS) to which functionalized CNT monolayers are electrostatically attached. The resonance frequency (fres) of electrostatically
actuated pMEMS bridges was measured as a function of their length (32–67 lm) for different multilayer compositions. A significant increase in fres and quality factor (Q) with the addition of CNT monolayers to the PEDOT:PSS structural material is observed, demonstrating that CNT
monolayers can be used to modulate pMEMS resonator properties. |
Abstract:
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Peer Reviewed |
Subject(s):
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-Àrees temàtiques de la UPC::Física -Microelectromechanical systems -MEMS -Carbon nanotube -Sistemes microelectromecànics -Nanotubs |
Rights:
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Document type:
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Article - Published version Article |
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