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Título:	Dielectric charge control in electrostatic MEMS positioners/varactors
Autor/a:	Blokhina, Elena; Gorreta Mariné, Sergio; Lopez, David; Molinero Giles, David; Feely, Orla; Pons Nin, Joan; Domínguez Pumar, Manuel
Otros autores:	Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
Abstract:	A new dynamical closed-loop method is proposed to control dielectric charging in capacitive microelectromechanical systems (MEMS) positioners/varactors for enhanced reliability and robustness. Instead of adjusting the magnitude of the control voltage to compensate the drift caused by the dielectric charge, the method uses a feedback loop to maintain it at a desired level: the device capacitance is periodically sampled, and bipolar pulses of constant magnitude are applied. Specific models describing the dynamics of charge and a control map are introduced. Validation of the proposed method is accomplished both through discrete-time simulations and with experiments using MEMS devices that suffer from dielectric charging.
Abstract:	Peer Reviewed
Materia(s):	-Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica -Microelectronics -Microelectromechanical systems -Sistemes microelectromecànics -Microelectrònica
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Tipo de documento:	Artículo - Versión publicada Artículo
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