Thermal response of AlN and CNx films as coatings of thin film anemometers

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Title:	Thermal response of AlN and CNx films as coatings of thin film anemometers
Author:	Arroyo, J.; Silvestre Bergés, Santiago; Coll Valentí, Arnau; Castañer Muñoz, Luis María
Other authors:	Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
Abstract:	Layers of AlN and CNx were investigated as suitable films to coat thin film anemometers because they are simultaneously electrical isolators and thermal conductors. Thermal time constants were measured and thermal equivalent models are proposed in this work. AlN performed better in the experiments.
Abstract:	Peer Reviewed
Subject(s):	-Àrees temàtiques de la UPC::Enginyeria electrònica::Instrumentació i mesura::Sensors i actuadors -Àrees temàtiques de la UPC::Enginyeria agroalimentària::Ciències de la terra i de la vida::Climatologia i meteorologia -Meteorological instruments -Anemometer -AlN -CNx -Thin film anemometers -Meteorologia -- Instruments -Anemòmetres
Rights:	Attribution-NonCommercial-NoDerivs 3.0 Spain http://creativecommons.org/licenses/by-nc-nd/3.0/es/
Document type:	Article - Draft Article
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