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Title:	Compact device for CO2 optical sensing using macroporous silicon photonic crystals
Author:	Vega Bru, Didac; Rodríguez Martínez, Ángel; Todorov Trifonov, Trifon; Calavia, Raul; Vilanova, Xavier
Other authors:	Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
Abstract:	A photonic crystal based on a macroporous silicon structure has been fabricated and successfully used for the detection of carbon dioxide. In this paper, the device and the measurement results are presented. The sensing device here described uses an optical approach to the detection of the gas. The use of a photonic crystal allows creating a compact device working in the medium infrared spectral range. A 700 nm square lattice macroporous structure was fabricated by electrochemical etching, creating a photonic gap centered at the 4.2 µm, a CO2 absorption line. The obtained results rely only on the absorption spectra measurement.
Subject(s):	-Àrees temàtiques de la UPC::Enginyeria electrònica -Carbon dioxide -chemical sensors -electrochemical etching -gas sensors -macroporous silicon -Anhídrid carbònic -Gasos -- Mesurament -Anhídrid carbònic -- Mesurament
Rights:	http://creativecommons.org/licenses/by-nc-nd/3.0/es/
Document type:	Article - Published version Conference Object
Published by:	Institute of Electrical and Electronics Engineers (IEEE)
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