Title:
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RF-MEMS switches for a full control of the propagating modes in uniplanar microwave circuits and their application to reconfigurable multimodal microwave filters
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Author:
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Contreras Lizarraga, Adrián Arturo; Casals Terré, Jasmina; Pradell i Cara, Lluís; Ribó i Pal, Miquel; Heredia Vega, Julio César; Giacomozzi, Flavio; Margesin, Benno
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Other authors:
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Universitat Politècnica de Catalunya. Departament d'Enginyeria Mecànica; Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions; Universitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones |
Abstract:
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This is a copy of the author 's final draft version of an article published in the journal Microsystem technologies. The final publication is available at Springer via http://dx.doi.org/10.1007/s00542-017-3379-8 |
Abstract:
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In this paper, new RF-MEMS switch configurations are proposed to enable control of the propagating (even and odd) modes in multimodal CPW transmission structures. Specifically, a switchable air bridge (a switchable short-circuit for the CPW odd mode) and switchable asymmetric shunt impedances (for transferring energy between modes) are studied and implemented using bridge-type and cantilever-type ohmic-contact switches, respectively. The switchable air bridge is based in a novel double ohmic-contact bridge-type structure. Optimized-shape suspension configurations, namely folded-beam or diagonal-beam for bridge-type switches, and straight-shaped or semicircular-shaped for cantilever-type switches, are used to obtain robust structures against fabrication-stress gradients. The switches are modelled using a coupled-field 3D finite-element mechanical analysis showing a low to moderate pull-in voltage. The fabricated switches are experimentally characterized using S-parameter and DC measurements. The measured pull-in voltages agree well with the simulated values. From S-parameter measurements, an electrical model with a very good agreement for both switch states (ON and OFF) has been obtained. The model is used in the design of reconfigurable CPW multimodal microwave filters. |
Abstract:
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Peer Reviewed |
Subject(s):
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-Àrees temàtiques de la UPC::Enginyeria de la telecomunicació -Microwave circuits -MEMS-switch -Uniplanar circuits -Reconfigurable microwave filters -CPW multimodal circuits -Circuits de microones |
Rights:
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Document type:
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Article - Submitted version Article |
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