Título:
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Silicon solar cells with heterojunction emitters and laser processed base contacts
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Autor/a:
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Jin, Chen; Martín García, Isidro; López Rodríguez, Gema; Harrison, S.; Masmitjà Rusiñol, Gerard; Ortega Villasclaras, Pablo Rafael; Alcubilla González, Ramón
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Otros autores:
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Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
Abstract:
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In this work, we report on a novel structure of Interdigitated Back-Contacted (IBC) solar cells on c-Si p-type substrates that combines laser processed homojunction base contacts and silicon heterojunction (SHJ) emitters. These hybrid devices which can lead to potential benefits in device processing and/or conversion efficiency. In the proposed fabrication process special attention has been paid to the compatibility of both involved technologies: silicon heterojunction and laser doping from dielectric films. In particular, we focus on the surface passivation obtained by the heterojunction emitter after removing the aluminum oxide/silicon carbide (Al2O3/SiCx) layer stack needed for the laser doping process and previously deposited on the c-Si surface. A severe passivation degradation after plasma et ching process to remove the top SiCx film is observed, despite leaving the Al2O3 film on the c-Si surface. Based on high-frequency capacitance-voltage characterization, an increase in the interface state density and a strong impact on the fixed charge density is deduced. Next, in order to choose an optimized metallization technology that could simultaneously contact both the ITO film and the p+ laser processed regions, we evaluate the contact quality of Titanium and Aluminum on ITO. Results show that Titanium is a better option with a specific contact resistance of 1.1 mohm cm2. Finally, finished hybrid IBC solar cells with conversion efficiencies in the 18-19% range are reported. |
Abstract:
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Peer Reviewed |
Materia(s):
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-Àrees temàtiques de la UPC::Energies::Energia solar fotovoltaica::Cèl·lules solars -Solar cells -DopLa cell -Heterojunction -Laser doping -Back-junction -c-Si solar cells -Cèl·lules solars |
Derechos:
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Attribution-NonCommercial-NoDerivs 3.0 Spain
http://creativecommons.org/licenses/by-nc-nd/3.0/es/ |
Tipo de documento:
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Artículo - Versión publicada Objeto de conferencia |
Editor:
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Elsevier
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Compartir:
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