Title:
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Characterization of nano-oxide layers fabricated by ion beam oxidation
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Author:
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Cardoso, Susana; Zongzhi Zhang; Haohua Li; Ferreira, R.; Freitas, P. P.; Peng Wei; Soares, J. C.; Snoeck, E.; Batlle Gelabert, Xavier
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Other authors:
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Universitat de Barcelona |
Abstract:
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In this paper, a remote O2 ion source is used for the formation of nano-oxide layers. The oxidation efficiency was measured in CoFe-oxide films, and a decrease of the oxide layer with the pan angle and the oxidation pressure is observed. For the same oxidation pressure, the oxidation efficiency depends on the O2 content in the Ar-O2 plasma. These results were applied in optimizing the fabrication of Al2O3 barrier for tunnel junctions. This method was also used to fabricate junctions with Fe-oxide layers inserted at the Al2O3-CoFe interface. TEM and magnetization data indicate that after anneal at 385°C, a homogeneous ferromagnetic Fe-oxide layer (Fe3O4?) is formed. |
Subject(s):
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-Oxidació -Aliatges de cobalt -Col·lisions (Física nuclear) -Aliatges de ferro -Plasma (Gasos ionitzats) -Microscòpia electrònica de transmissió -Efecte túnel -Oxidation -Cobalt alloys -Collisions (Nuclear physics) -Iron alloys -Plasma (Ionized gases) -Transmission electron microscopy -Tunneling (Physics) |
Rights:
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(c) IEEE, 2002
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Document type:
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Article Article - Published version |
Published by:
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IEEE
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