Title:
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Design of a charge injection compensation system for MEMS electrostatic actuators
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Author:
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Karliński, Kamil
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Other authors:
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Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Madrenas Boadas, Jordi |
Abstract:
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Projecte final de carrera realitzat en col.laboració amb Technical University of Lodz |
Abstract:
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The main goal of this project is to implement and experimentally verify various control algorithms
for MEMS electrostatic actuators. Those algorithms include a charge injection compensation
subsystem.
The hardware platform consists of some MEMS electrostatic actuators, a front-end sensing
system (comprising a full-custom mixed-signal integrated circuit designed at UPC and a highspeed
A/D converter) and a Xilinx FPGA for algorithm coding.
The work involves the following:
o Understanding the working principle of the hardware platform and the issues related to
MEMS electrostatic actuators.
o Improve the hardware platform, if required by the control algorithm. This might involve
some simple PCB design and test with laboratory instrumentation.
o Algorithm implementation in VHDL. This includes the signal-processing algorithms and
also the ancillary routines for I/O data extraction and signal visualization.
Capacitance of MEMS electrostatic actuators were measured under different voltages
conditions. It was found that positive voltage stress caused negative charging of the dielectric
whereas negative voltage stress caused positive charging of the dielectric. This is consistent with
the nature of traps in the silicon oxynitride dielectric used for the switches.
Report is divided into three parts, the first chapter is devoted to the description to the MEMS
word. The chapter is devoted a small multiplexing board design description. And finally chapter 3
introduce a development of a VHDL code to control all system. |
Subject(s):
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-Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica -Microelectromechanical systems -Charge injection -VHDL -MEMS actuators -Sistemes microelectromecànics |
Rights:
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Attribution-NonCommercial-NoDerivs 3.0 Spain
http://creativecommons.org/licenses/by-nc-nd/3.0/es/ |
Document type:
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Bachelor Thesis |
Published by:
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Universitat Politècnica de Catalunya
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