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dc.contributor | Universitat de Barcelona |
---|---|
dc.contributor.author | Viera Mármol, Gregorio |
dc.contributor.author | Huet, S. |
dc.contributor.author | Bertrán Serra, Enric |
dc.contributor.author | Boufendi, L. |
dc.date | 2012-05-03T07:23:35Z |
dc.date | 2012-05-03T07:23:35Z |
dc.date | 2001-10-15 |
dc.identifier.citation | 0021-8979 |
dc.identifier.citation | 184386 |
dc.identifier.uri | http://hdl.handle.net/2445/24793 |
dc.format | 9 p. |
dc.format | application/pdf |
dc.language.iso | eng |
dc.publisher | American Institute of Physics |
dc.relation | Reproducció del document publicat a: http://dx.doi.org/10.1063/1.1398066 |
dc.relation | Journal of Applied Physics, 2001, vol. 90, núm. 8, p. 4272-4280 |
dc.relation | http://dx.doi.org/10.1063/1.1398066 |
dc.rights | (c) American Institute of Physics, 2001 |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Pel·lícules fines |
dc.subject | Espectroscòpia Raman |
dc.subject | Nanoestructures |
dc.subject | Microelectrònica |
dc.subject | Radiofreqüència |
dc.subject | Optoelectrònica |
dc.subject | Thin films |
dc.subject | Raman spectroscopy |
dc.subject | Nanostructures |
dc.subject | Microelectronics |
dc.subject | Radio frequency |
dc.subject | Optoelectronics |
dc.title | Polymorphous Si thin films from radio frequency plasmas of SiH4 diluted in Ar: A study by transmission electron microscopy and Raman spectroscopy |
dc.type | info:eu-repo/semantics/article |
dc.type | info:eu-repo/semantics/publishedVersion |
dc.description.abstract |