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dc.contributor | Universitat de Barcelona |
---|---|
dc.contributor.author | Corbella Roca, Carles |
dc.contributor.author | Rubio-Roy, M. |
dc.contributor.author | Bertrán Serra, Enric |
dc.contributor.author | Andújar Bella, José Luis |
dc.date | 2012-05-07T06:44:53Z |
dc.date | 2012-05-07T06:44:53Z |
dc.date | 2009-08-05 |
dc.identifier.citation | 0021-8979 |
dc.identifier.citation | 574678 |
dc.identifier.uri | http://hdl.handle.net/2445/24963 |
dc.format | 11 p. |
dc.format | application/pdf |
dc.language.iso | eng |
dc.publisher | American Institute of Physics |
dc.relation | Reproducció del document publicat a: http://dx.doi.org/10.1063/1.3183945 |
dc.relation | Journal of Applied Physics, 2009, vol. 106, núm. 3, p. 033302 |
dc.relation | http://dx.doi.org/10.1063/1.3183945 |
dc.rights | (c) American Institute of Physics, 2009 |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Metà |
dc.subject | Electrons |
dc.subject | Pel·lícules fines |
dc.subject | Revestiments protectors |
dc.subject | Aplicacions industrials |
dc.subject | Plasma (Gasos ionitzats) |
dc.subject | Methane |
dc.subject | Electrons |
dc.subject | Thin films |
dc.subject | Protective coatings |
dc.subject | Industrial applications |
dc.subject | Plasma (Ionized gases) |
dc.title | Plasma parameters of pulsed-dc discharges in methane used to deposit diamondlike carbon films |
dc.type | info:eu-repo/semantics/article |
dc.type | info:eu-repo/semantics/publishedVersion |
dc.description.abstract |