Títol:
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Electrothermally actuated RF MEMS switches suspended on a low-resistivity substrate
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Autor/a:
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Girbau Sala, David; Pradell i Cara, Lluís; Lázaro Guillén, Antoni; Nebot Serra, Àlvar
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Altres autors:
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Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions; Universitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones |
Abstract:
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This paper presents an electrothermally actuated lateral resistive-contact switch for application to low-gigahertz-band communication systems. It was manufactured on a standard low-resistivity substrate, and its RF performance was improved by suspending the structures 25 μm from the substrate, which is a strategy for future integration with active devices in the system-on-chip concept. Measured insertion losses are−0.26 dB at 1 GHz and −0.65 dB at 6 GHz, return losses are −29 dB at 1 GHz and −25 dB at 6 GHz, and isolations are −52 dB at 1 GHz and −26 dB at 6 GHz. The device is driven by a metal electrothermal actuator, which achieves large displacements and contact forces at much lower temperatures than traditional polysilicon electrothermal actuators. The RF power handling characteristics are also addressed and measured. |
Abstract:
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Peer Reviewed |
Matèries:
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-Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica -Microelectromechanical systems -microwave switches -microswitches -loss -0.26 dB -loss -0.65 dB -loss -29 dB -loss -25 dB -frequency 1 GHz -frequency 6 GHz -electrothermally actuated RF MEMS switches -low-resistivity substrate -electrothermally actuated lateral resistive-contact switch -low-gigahertz-band communication systems -system-on-chip concept -metal electrothermal actuator -contact forces -polysilicon electrothermal actuators -RF power handling characteristics -microelectromechanical systems switch -Sistemes microelectromecànics |
Drets:
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Tipus de document:
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Article |
Publicat per:
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IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
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