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dc.contributor | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
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dc.contributor | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
dc.contributor.author | Hernández Díaz, David |
dc.contributor.author | Lange, D. |
dc.contributor.author | Todorov Trifonov, Trifon |
dc.contributor.author | Garin Escriva, Moises |
dc.contributor.author | García Molina, Francisco Miguel |
dc.contributor.author | Rodríguez Martínez, Ángel |
dc.contributor.author | Alcubilla González, Ramón |
dc.date | 2010-06 |
dc.identifier.citation | Hernández, D. [et al.]. 3D metallo-dielectric structures combining electrochemical and electroplating techniques. "Microelectronic engineering", Juny 2010, vol. 87, núm. 5-8, p. 1458-1462. |
dc.identifier.citation | 0167-9317 |
dc.identifier.citation | 10.1016/j.mee.2009.11.108 |
dc.identifier.uri | http://hdl.handle.net/2117/7150 |
dc.language.iso | eng |
dc.relation | http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6V0W-4XSTCY1-5&_user=1517299&_coverDate=08%2F31%2F2010&_rdoc=1&_fmt=high&_orig=search&_sort=d&_docanchor=&view=c&_acct=C000053450&_version=1&_urlVersion=0&_userid=1517299&md5=9baaf09ec71b1ae789df67c7b2772bd3 |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Electroplating |
dc.subject | Photonic crystals |
dc.subject | Microelectrònica -- Materials |
dc.title | 3D metallo-dielectric structures combining electrochemical and electroplating techniques |
dc.type | info:eu-repo/semantics/publishedVersion |
dc.type | info:eu-repo/semantics/article |
dc.description.abstract | |
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