Title:
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Testing IC accelerometers using Lissajous compositions
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Author:
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Gómez Pau, Álvaro; Balado Suárez, Luz María; Figueras Pàmies, Joan
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Other authors:
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Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. QINE - Disseny de Baix Consum, Test, Verificació i Circuits Integrats de Seguretat |
Abstract:
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Micro Electro Mechanical devices (MEMs) have
widened their range of applications in a spectacular way in
the last years. Reliability of MEMs devices is one of the areas
that need to be improved to achieve high volume production
at allowable costs. Accelerometers have in their design some
mechanical and layout symmetries that can be used to improve
the test and diagnosis results. In our approach we take profit of
the symmetries of dual axis accelerometers to analyze and test
its behavior using a procedure that composes the two orthogonal
outputs when the accelerometer is spun. The complexity in
the kinematics seen by the sensitive axes of the accelerometer
yields rich and complex Lissajous traces that characterize the
device and allows to determine the possible mismatchings in the
assumed damped mass model parameters. In order to compare
and quantify parameter discrepancies, a metric has been defined
to allow to determine whether the DUT is within specifications
or not. |
Abstract:
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Peer Reviewed |
Subject(s):
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-Àrees temàtiques de la UPC::Enginyeria electrònica -Electronics -Acceleròmetres |
Rights:
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Attribution-NonCommercial-NoDerivs 3.0 Spain
http://creativecommons.org/licenses/by-nc-nd/3.0/es/ |
Document type:
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Article - Published version Conference Object |
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