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Título: | Multilayer ISFET membranes for microsystems applications |
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Autor/a: | Cané, Carles; Götz, A.; Merlos, A.; Gràcia, I.; Errachid, Abdelhamid; Losantos Viñolas, Pedro; Lora-Tamayo, E. |
Otros autores: | Universitat Politècnica de Catalunya. Departament d'Organització d'Empreses |
Abstract: | The fabrication of microsystems in which chemical measurements play a role make the on-chip combination of chemical sensors and signal processing circuitry highly desirable. Chemical sensors use sensitive layers which are not a part of MOS devices and in this sense, the determination of the best sensors and technological processes to achieve good integrated smart sensors is very important. In this paper a study of compatibility of ISFET chemical sensors and CMOS circuitry is presented for application to biomedical microsystems. |
Materia(s): | -Àrees temàtiques de la UPC::Economia i organització d'empreses -Chemical detectors -Integrated circuits -Multilayer ISFET membranes -Microsystem application -Sensors químics -Circuits integrats |
Derechos: | Attribution-NonCommercial-NoDerivs 3.0 Spain
http://creativecommons.org/licenses/by-nc-nd/3.0/es/ |
Tipo de documento: | Artículo - Versión publicada Artículo |
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