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Título:	Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer
Autor/a:	Azcona Guerrero, Francisco Javier; Jha, Ajit; Yáñez Alvarado, Carlos René; Atashkhooei, Reza; Royo Royo, Santiago
Otros autores:	Universitat Politècnica de Catalunya. Departament d'Òptica i Optometria; Universitat Politècnica de Catalunya. GREO - Grup de Recerca en Enginyeria Òptica
Abstract:	Microcantilever motion detection is a useful tool for the characterization of the physical, chemical and biological properties of materials. In the past, different approaches have been proposed and tested to enhance the behavior, size and simplicity of microcantilever motion detectors. In this paper, a new approach to measure microcantilever motion with nanometric resolution is presented. The proposed approach is based on the concept of mechanically-modulated optical feedback interferometry, a technique that has shown displacement measurement capabilities well within the nanometric scale and that, due to its size, compactness and low cost, may be a suitable choice for measuring nanometric motions in cantilever-like sensors. It will be shown that the sensor, in its current state of development, is capable of following a cantilever sinusoidal trajectory at different sets of frequencies ranging up to 200 Hz and peak to peak amplitudes up to ¿/2 with experimental resolutions in the ¿/100 range.
Materia(s):	-Àrees temàtiques de la UPC::Ciències de la visió::Òptica física -Àrees temàtiques de la UPC::Enginyeria electrònica::Instrumentació i mesura -Àrees temàtiques de la UPC::Enginyeria dels materials -Optical fiber detectors -Atomic force microscopy -Resolution (Optics) -Nanoscience -Measuring instruments -optical feedback interferometry -displacement measurement -nanometric resolution -atomic force microscopy -Detectors de fibra òptica -Microscòpia de força atòmica -Nanociència -Mesurament -- Instruments -Detectors òptics
Derechos:	http://creativecommons.org/licenses/by-nc-nd/3.0/es/
Tipo de documento:	Artículo - Versión publicada Artículo
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