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Título:	Design and test of resonators using PiezoMUMPS technology
Autor/a:	Pons Nin, Joan; Gorreta Mariné, Sergio; Domínguez Pumar, Manuel; Blokhina, Elena; O'Connell, D.; Feely, Orla
Otros autores:	Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
Abstract:	© 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes,creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Abstract:	This paper presents preliminary results obtained with devices fabricated with the new PiezoMUMPS process. Since these devices will be used as resonators in applications based on Pulsed Digital Oscillators, we analyze, both with simulations and measurements, the mechanical vibration modes that can be excited and detected. We also introduce a specific version of PDO for piezoelectric MEMS.
Abstract:	Peer Reviewed
Materia(s):	-Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica::Circuits integrats -Integrated circuits -Piezo-MEMS -MEMS resonators -Mechanical modes -Circuits integrats
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Tipo de documento:	Artículo - Versión presentada Objeto de conferencia
Editor:	Institute of Electrical and Electronics Engineers (IEEE)
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