Thermal response of AlN and CNx films as coatings of thin film anemometers

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To access the full text documents, please follow this link: http://hdl.handle.net/2117/19864

dc.contributor	Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.contributor	Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.contributor.author	Arroyo, J.
dc.contributor.author	Silvestre Bergés, Santiago
dc.contributor.author	Coll Valentí, Arnau
dc.contributor.author	Castañer Muñoz, Luis María
dc.date	2013-05
dc.identifier.citation	J. Arroyo [et al.]. Thermal response of AlN and CNx films as coatings of thin film anemometers. "Measurement", Maig 2013, vol. 46, núm. 4, p. 1421-1426.
dc.identifier.citation	0263-2241
dc.identifier.citation	10.1016/j.measurement.2012.12.003
dc.identifier.uri	http://hdl.handle.net/2117/19864
dc.language.iso	eng
dc.relation	http://www.sciencedirect.com/science/article/pii/S0263224112004708
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 Spain
dc.rights	info:eu-repo/semantics/openAccess
dc.rights	http://creativecommons.org/licenses/by-nc-nd/3.0/es/
dc.subject	Àrees temàtiques de la UPC::Enginyeria electrònica::Instrumentació i mesura::Sensors i actuadors
dc.subject	Àrees temàtiques de la UPC::Enginyeria agroalimentària::Ciències de la terra i de la vida::Climatologia i meteorologia
dc.subject	Meteorological instruments
dc.subject	Anemometer
dc.subject	AlN
dc.subject	CNx
dc.subject	Thin film anemometers
dc.subject	Meteorologia -- Instruments
dc.subject	Anemòmetres
dc.title	Thermal response of AlN and CNx films as coatings of thin film anemometers
dc.type	info:eu-repo/semantics/draft
dc.type	info:eu-repo/semantics/article
dc.description.abstract	Layers of AlN and CNx were investigated as suitable films to coat thin film anemometers because they are simultaneously electrical isolators and thermal conductors. Thermal time constants were measured and thermal equivalent models are proposed in this work. AlN performed better in the experiments.
dc.description.abstract	Peer Reviewed

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