Título:
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Excitation of multiple spatial modes of a MENS cantilever in the pulsed digital oscillator
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Autor/a:
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Blokhina, Elena; Feely, Orla; Domínguez Pumar, Manuel
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Otros autores:
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Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
Abstract:
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The aim of this paper is to apply an approach that
will allow us to consider different mechanical modes of a MEMS
cantilever in the form of separate mass-spring-damper equations
with the appropriate form of an external driving. In the paper, we
focus on a specific MEMS cantilever and use a Pulsed Digital Oscillator
(PDO) to keep self-sustained oscillations of the mechanical
structure. By applying the order-reduction procedure to a partial
differential equation that describes the transversal deflections, we
obtain a system of coupled ordinary differential equations that
describes the excitation of multiple spatial modes. On the basis
of these ordinary differential equations, we formulate a set of
iterative maps to describe the evolution of the modes between
two sampling events. The numerical simulations we present are
focused on the most common case when the first two mechanical
modes are taken into consideration. |
Materia(s):
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-Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Processament del senyal -Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica -Electronics -Signal theory (Telecommunication) -Senyal, Teoria del (Telecomunicació) -Electrònica |
Derechos:
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Tipo de documento:
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Artículo - Versión publicada Objeto de conferencia |
Editor:
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IEEE Press. Institute of Electrical and Electronics Engineers
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