Título:
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Silicon microlens antenna for multi-pixel THz heterodyne detector arrays
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Autor/a:
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Lee, Choonsup; Chattopadhyay, Goutam; Jung, Cecile; Reck, Theodore; Cooper, Ken; Peralta, Alex; Lin, Robert; Mehdi, Imran; Alonso del Pino, María; Llombart Juan, Nuria
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Abstract:
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Silicon micromachined RF passive components such as washers, waveguide with 90 degree bends for 325-500 GHz band, and silicon-stacked blocks for W-band (75-110 GHz) GaAs power amplifiers have been designed, microfabricated, and characterized. Based on these results, we have successfully stacked several silicon micromachined wafers in order to build a Receiver-On-a-Chip (ROC) at 560 GHz. To the authors' knowledge, this is the first demonstration of an all integrated silicon micromachined receiver front-end at submillimeter wavelengths. In addition, we have developed silicon microlens antenna which is compatible with the current silicon micromachined ROC. We have also developed wafer-level microlens microfabrication technique. |
Abstract:
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Peer Reviewed |
Materia(s):
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-Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques -Millimeter waves -Power amplifiers -Elemental semiconductors -Gallium arsenide -Heterodyne detection -III-V semiconductors -Lens antennas -Micromachining -Millimetre wave detectors -Millimetre wave power amplifiers -Silicon -Terahertz wave detectors -Waveguides -Ones mil·limètriques -Amplificadors de potència |
Derechos:
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Tipo de documento:
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Artículo - Versión publicada Objeto de conferencia |
Editor:
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Institute of Electrical and Electronics Engineers (IEEE)
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