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dc.contributor | Universitat de Barcelona |
---|---|
dc.contributor.author | Roca i Cabarrocas, P. (Pere) |
dc.contributor.author | Hamma, S. |
dc.contributor.author | Hadjadj, A. |
dc.contributor.author | Bertomeu i Balagueró, Joan |
dc.contributor.author | Andreu i Batallé, Jordi |
dc.date | 2013-04-19T09:44:22Z |
dc.date | 2013-04-19T09:44:22Z |
dc.date | 1996 |
dc.date | 2013-04-19T09:44:22Z |
dc.identifier.citation | 0003-6951 |
dc.identifier.citation | 112638 |
dc.identifier.uri | http://hdl.handle.net/2445/34659 |
dc.format | 3 p. |
dc.format | application/pdf |
dc.language.iso | eng |
dc.publisher | American Institute of Physics |
dc.relation | Reproducció del document publicat a: http://dx.doi.org/10.1063/1.117776 |
dc.relation | Applied Physics Letters, 1996, vol. 69, num. 4, p. 529-531 |
dc.relation | http://dx.doi.org/10.1063/1.117776 |
dc.rights | (c) American Institute of Physics , 1996 |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Silici |
dc.subject | Pel·lícules fines |
dc.subject | Propietats òptiques |
dc.subject | Microscòpia electrònica de transmissió |
dc.subject | Silicon |
dc.subject | Thin films |
dc.subject | Optical properties |
dc.subject | Transmission electron microscopy |
dc.title | New features of the layer-by-layer deposition of microcrystalline silicon films revealed by spectroscopic ellipsometry and high resolution transmission electron microscopy |
dc.type | info:eu-repo/semantics/article |
dc.type | info:eu-repo/semantics/publishedVersion |
dc.description.abstract |