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Title: | A Second-order delta-sigma control of dielectric charge for contactless capacitive MEMS |
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Author: | Gorreta Mariné, Sergio; Pons Nin, Joan; Blokhina, Elena; Domínguez Pumar, Manuel |
Other authors: | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
Abstract: | |
Subject(s): | -Àrees temàtiques de la UPC::Enginyeria electrònica -Microelectromechanical systems. -Dielectric charging control -MEMS reliability -Sistemes microelectromecànics |
Rights: | Attribution-NonCommercial-NoDerivs 3.0 Spain
http://creativecommons.org/licenses/by-nc-nd/3.0/es/ |
Document type: | Article - Published version Article |
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