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Title:
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P3R-3 design and characterization of air coupled ultrasonic transducers based on MUMPs
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Author:
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Martínez Graullera, Óscar Fernando; Martín Arguedas, Carlos Julián; Gómez-Ullate Alvear, Luis; Domínguez Pumar, Manuel
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Other authors:
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Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
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Abstract:
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This paper deals with the design and characterization of several capacitive micromachined ultrasonic transducer (cMUT) cells for the future design of an air-coupled transducer for non destructive testing (NDT). Each design was manufactured using the multi-user MEMS process (MUMPs). Special boundary conditions were used to obtain high efficiency: two opposite sides of the 150 mum square shaped membranes are free while the other sides are anchored to a fixed layer of the process. Using these designs a large displacement of the membrane and a higher surface contact is obtained in spite of their mechanical losses |
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Abstract:
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Peer Reviewed |
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Subject(s):
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-Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Processament del senyal::Processament de la parla i del senyal acústic
-Ultrasonic waves
-Micromachining
-Micromechanical devices
-Ultrasonic materials testing
-Ultrasonic transducers
-Ultrasons |
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Rights:
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Document type:
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Article - Published version
Conference Object |
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Published by:
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Institute of Electrical and Electronics Engineers (IEEE)
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