Digital resonance for MEMS

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RECERCAT Home > Universitat Politècnica de Catalunya > Documents de recerca > View document

To access the full text documents, please follow this link: http://hdl.handle.net/2117/6658

dc.contributor	Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.contributor	Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.contributor.author	Ricart Campos, Jordi
dc.contributor.author	Pons Nin, Joan
dc.contributor.author	Gorreta Mariné, Sergio
dc.contributor.author	Domínguez Pumar, Manuel
dc.date	2009-02-11
dc.identifier.citation	Ricart, J. [et al.]. Digital resonance for MEMS. A: Spanish Conference on Electronics Devices. "7th Spanish Conference on Electronic Devices". Santiago de Compostela: IEEE Press. Institute of Electrical and Electronics Engineers, 2009, p. 312-315.
dc.identifier.citation	978-1-4244-2839-7
dc.identifier.citation	IEEE
dc.identifier.uri	http://hdl.handle.net/2117/6658
dc.language.iso	eng
dc.publisher	IEEE Press. Institute of Electrical and Electronics Engineers
dc.relation	http://www.ac.usc.es/cde09/
dc.rights	info:eu-repo/semantics/openAccess
dc.subject	Àrees temàtiques de la UPC::Enginyeria electrònica
dc.subject	Microelectromechanical systems.
dc.title	Digital resonance for MEMS
dc.type	info:eu-repo/semantics/publishedVersion
dc.type	info:eu-repo/semantics/conferenceObject
dc.description.abstract	This work shows the application of Pulsed Digital Oscillators to the detection of physical changes in MEMS devices that cause small shifts in their resonance frequencies. Such devices can be used as resonators in several sensor applications. According to this, a case study using a PDO structure to measure small concentrations of volatile organic gas compounds (VOC’s) introduced here. The MEMS devices used are cantilevers with a thin layer of polymer sensitive to the VOC concentration. Such devices have been simulated with the Coventor software to see the influence of the polymer layers on their mechanical responses. Finally, experimental measurements with various VOCs have been done, and results extracted from two PDO system sources, digital and analog, have been analyzed and compared.
dc.description.abstract	Peer Reviewed

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