Title:
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Characterization of dynamics in RF-MEMS switches
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Author:
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Llamas Morote, Marco Antonio; Girbau Sala, David; Pradell i Cara, Lluís; Lázaro Guillén, Antoni; Giacomozzi, Flavio; Colpo, S
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Other authors:
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Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions; Universitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones |
Abstract:
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This paper proposes a new method to measure dynamics
and power handling of RF microelectromechanical systems
(MEMS) devices based on a mobile membrane. The method uses
in-phase/quadrature demodulation of an RF signal proportional
to the reflection coefficient of the measured device, which contains
information of its mechanical properties, such as actuation and
release times and instantaneous position of the mobile membrane.
Both one-port (capacitors) and two-port devices (switches and
extended tuning-range capacitors) can be measured. Its main
advantage is the capability of obtaining information from both
magnitude and phase variations of the device reflection coefficient
to characterize its dynamics and power handling. It is shown that
detecting phase is advantageous in high quality factor capacitors,
where the magnitude of the reflection coefficient is nearly constant
for any position of the mobile membrane. Open-short-load
calibration of the system is provided in order to obtain absolute
measurements, which are necessary for power-handling
characterization. The performances of the proposed method are
demonstrated by comparison to systems based on detection of
the magnitude of the reflection coefficient. A MEMS capacitor
is characterized in terms of dynamics—actuation and release
times, and mechanical resonance frequency—and in terms of
power handling—membrane instantaneous position and phase
and tuning range variation. |
Subject(s):
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-Àrees temàtiques de la UPC::Enginyeria de la telecomunicació -Signal theory (Telecommunication) -Microelectromechanical systems -Senyal, Teoria del (Telecomunicació) |
Rights:
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Document type:
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Article - Published version Conference Object |
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