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Title:
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Pulsed digital oscillators for electrostatic MEMS
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Author:
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Gorreta Mariné, Sergio; Ruiz Fernández, Daniel; Blokhina, Elena; Pons Nin, Joan; Jiménez Serres, Vicente; O'Connell, D.; Feely, Orla; Madrenas Boadas, Jordi; Domínguez Pumar, Manuel
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Other authors:
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Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies; Universitat Politècnica de Catalunya. AHA - Arquitectures Hardware Avançades |
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Abstract:
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This paper introduces a new actuation scheme for implementing Pulsed Digital Oscillators (PDOs) for electrostatic MEMS resonators. In this scheme, the capacitance of the device is
biased with a voltage and it is periodically sampled. Short pulses of zero voltage are applied depending on the decisions taken by the oscillator loop. The paper discusses in detail the implementation of such electrostatic PDO (e-PDO) through a prototype and links the e-PDO to the conventional PDO theory. As an example, it is shown that with this actuation scheme it is possible to excite different resonances of the mechanical structure simply by changing the parameters of the feedback filter of the oscillator. |
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Subject(s):
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-Àrees temàtiques de la UPC::Enginyeria electrònica
-Electrostatic apparatus and appliances
-Oscillators, Electric.
-Electrostatic actuation
-microelectromechanical systems (MEMS)
-oscillators
-Oscil·ladors elèctrics
-Oscil·ladors |
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Rights:
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Document type:
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Article - Published version
Article |
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