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Título:	Tuning hardness and fracture resistance of ZrN/Zr0.63Al0.37N nanoscale multilayers by stress-induced transformation toughening
Autor/a:	Yalamanchili, K; Schramm, I. C.; Jiménez Piqué, Emilio; Rogstrom, L; Muecklich, F.; Oden, M; Ghafoor, N
Otros autores:	Universitat Politècnica de Catalunya. Departament de Ciència dels Materials i Enginyeria Metal·lúrgica; Universitat Politècnica de Catalunya. CIEFMA - Centre d'Integritat Estructural, Micromecànica i Fiabilitat dels Materials
Abstract:	Structure and mechanical properties of nanoscale multilayers of ZrN/Zr0.63Al0.37N grown by reactive magnetron sputtering on MgO (0 0 1) substrates at a temperature of 700 degrees C are investigated as a function of the Zr0.63Al0.37N layer thickness. The Zr0.63Al0.37N undergoes in situ chemical segregation into ZrN-rich and AlN-rich domains. The AlN-rich domains undergo transition from cubic to wurtzite crystal structure as a function of Zr0.63Al0.37N layer thickness. Such structural transformation allows systematic variation of hardness as well as fracture resistance of the films. A maximum fracture resistance is achieved for 2 nm thick Zr0.63Al0.37N layers where the AlN-rich domains are epitaxially stabilized in the metastable cubic phase. The metastable cubic-AlN phase undergoes stress-induced transformation to wurtzite-AlN when subjected to indentation, which results in the enhanced fracture resistance. A maximum hardness of 34 GPa is obtained for 10 nm thick Zr0.63Al0.37N layers where the wurtzite-AlN and cubic-ZrN rich domains form semi-coherent interfaces. (C) 2015 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
Materia(s):	-Àrees temàtiques de la UPC::Enginyeria dels materials -Fracture mechanics -Nitride multilayer thin films -Mechanical properties -Fracture toughness -transmission electron-microscopy -magnetron sputter-deposition -thin-films -mechanical-properties -cubic aln -phase -deformation -coatings -superlattices -tin -Mecànica de fractura
Derechos:	http://creativecommons.org/licenses/by-nc-nd/3.0/es/
Tipo de documento:	Artículo - Versión presentada Artículo
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