Title:
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Optical properties of 3D macroporous silicon structures
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Author:
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Garin Escriva, Moises; Todorov Trifonov, Trifon; Rodríguez Martínez, Ángel; Marsal Garví, Lluís Francesc; Alcubilla González, Ramón
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Other authors:
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Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
Abstract:
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We study the optical properties of three-dimensional (3D) microstructures fabricated by electrochemical etching of macroporous silicon with modulated pore diameter. Optical measurements along the pore axis reveal photonic band gaps which are also confirmed by calculations of photonic band dispersion. We investigate numerically and experimentally the evolution of these gaps as a function of pore diameter modulation. In addition, a subsequent anisotropic etching of macroporous silicon in alkaline solutions allows to achieve pores with new shapes of modulation. We compare the optical characteristics of 3D macroporous structures with and without such anisotropic treatment. |
Abstract:
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Peer Reviewed |
Subject(s):
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-Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Telecomunicació òptica::Fotònica -Àrees temàtiques de la UPC::Física::Física de l'estat sòlid::Semiconductors -Photonics -Silicon -Macroporous silicon -Three-dimensional structures -Photonic crystals -Electrochemical etching -Alkaline etching -Fotònica -Silici |
Rights:
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Document type:
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Article - Published version Article |
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