dc.contributor.author |
Couso, Carlos |
dc.contributor.author |
Porti i Pujal, Marc |
dc.contributor.author |
Martin Martinez, Javier |
dc.contributor.author |
Iglesias, V. |
dc.contributor.author |
Nafría i Maqueda, Montserrat |
dc.contributor.author |
Aymerich Humet, Xavier |
dc.date |
2015 |
dc.identifier |
https://ddd.uab.cat/record/136766 |
dc.identifier |
urn:10.1116/1.4915328 |
dc.identifier |
urn:oai:ddd.uab.cat:136766 |
dc.identifier |
urn:recercauab:ARE-79594 |
dc.identifier |
urn:scopus_id:84925645324 |
dc.identifier |
urn:wos_id:000355011700036 |
dc.identifier |
urn:oai:egreta.uab.cat:publications/c78ad5c5-204f-41fd-b6a6-cd916f79474d |
dc.format |
application/pdf |
dc.language |
eng |
dc.publisher |
|
dc.relation |
Ministerio de Economía y Competitividad TEC2013-45638-C3-1-R |
dc.relation |
Agència de Gestió d'Ajuts Universitaris i de Recerca 2014/SGR-384 |
dc.relation |
Journal of Vaccuum Science and Technology B ; Vol. 33 No. 3 (May-June 2015), p031801/1-031801/6 |
dc.rights |
open access |
dc.rights |
Tots els drets reservats. |
dc.rights |
https://rightsstatements.org/vocab/InC/1.0/ |
dc.subject |
Topography |
dc.subject |
Polycrystals |
dc.subject |
Dielectric thin films |
dc.subject |
Electrical properties |
dc.subject |
Atomic force microscopy |
dc.title |
Conductive-AFM topography and current maps simulator for the study of polycrystalline high-k dielectrics |
dc.type |
Article |
dc.description.abstract |
Altres ajuts: ERDF/TEC2013-45638-C3-1-R |
dc.description.abstract |
In this work, a simulator of conductive atomic force microscopy (C-AFM) was developed to reproduce topography and current maps. In order to test the results, the authors used the simulator to investigate the influence of the C-AFM tip on topography measurements of polycrystalline high-k dielectrics, and compared the results with experimental data. The results show that this tool can produce topography images with the same morphological characteristics as the experimental samples under study. Additionally, the current at each location of the dielectric stack was calculated. The quantum mechanical transmission coefficient and tunneling current were obtained from the band diagram by applying the Airy wavefunction approach. Good agreement between experimental and simulation results indicates that the tool can be very useful for evaluating how the experimental parameters influence C-AFM measurements. |