Molecular hydrogen diffusion in nanostructured amorphous silicon thin films

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Title:	Molecular hydrogen diffusion in nanostructured amorphous silicon thin films
Author:	Kail, Fatiha; Farjas Silva, Jordi; Roura Grabulosa, Pere
Abstract:	We study hydrogen stability and its evolution during thermal annealing in nanostructured amorphous silicon thin films. From the simultaneous measurement of heat and hydrogen desorption, we obtain the experimental evidence of molecular diffusion in these materials. In addition, we introduce a simple diffusion model which shows good agreement with the experimental data
Publication date:	2013-11-12
Subject(s):	-Hidrogenació -Hydrogenation -Silici -Silicon -Materials nanoestructurals -Nanostructure materials -Thin films -Capes fines
Rights:	Tots els drets reservats
Document type:	Article Article - Published version
Published by:	American Physical Society
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