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dc.contributor | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
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dc.contributor | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
dc.contributor.author | Gorreta Mariné, Sergio |
dc.contributor.author | Pons Nin, Joan |
dc.contributor.author | Domínguez Pumar, Manuel |
dc.contributor.author | Blokhina, Elena |
dc.contributor.author | Feely, Orla |
dc.date | 2015 |
dc.identifier.citation | Gorreta, S., Pons, J., Dominguez, M., Blokhina, E., Feely, O. Characterization method of the dynamics of the trapped charge in contactless capacitive MEMS. A: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. "2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2014): Cannes, France: 1-4 April 2014". Institute of Electrical and Electronics Engineers (IEEE), 2015, p. 1-6. |
dc.identifier.citation | 978-2-35500-028-7 |
dc.identifier.citation | 10.1109/DTIP.2014.7056667 |
dc.identifier.uri | http://hdl.handle.net/2117/120172 |
dc.language.iso | eng |
dc.publisher | Institute of Electrical and Electronics Engineers (IEEE) |
dc.relation | https://ieeexplore.ieee.org/abstract/document/7056667/ |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Àrees temàtiques de la UPC::Enginyeria elèctrica |
dc.subject | Dielèctrics |
dc.subject | Microelectromechanical systems |
dc.subject | Dielectrics |
dc.subject | MEMS reliability |
dc.subject | Dielectric charge dynamics |
dc.subject | Sistemes microelectromecànics |
dc.title | Characterization method of the dynamics of the trapped charge in contactless capacitive MEMS |
dc.type | info:eu-repo/semantics/publishedVersion |
dc.type | info:eu-repo/semantics/conferenceObject |
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