Hypersonic, thermally activated surface acoustic waves propagating in the surface of crystalline silicon patterned with periodic stripes were studied by Brillouin light scattering. Two characteristic directions (normal and parallel to the stripes) of surface acoustic waves propagation were examined exhibiting a distinctive propagation behavior. The measured phononic band structure exhibits diverse features, such as zone folding, band gap opening, and hybridization to local resonance for waves propagating normal to the stripes, and a variety of dispersive modes propagating along the stripes. Experimental results were supported by theoretical calculations performed using finite element method.
Anglès
Brillouin light scattering; Crystalline silicons; Dispersive modes; Phonon propagation; Propagation behavior; Surface acoustic waves; Theoretical calculations; Thermally activated
European Commission 309150
Ministerio de Ciencia e Innovación CSD2010-0044
Ministerio de Economía y Competitividad MAT2012-31392
Applied physics letters ; Vol. 104, Issue 12 (March 2014), art. 123108
open access
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