dc.contributor
Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.contributor
Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.contributor.author
López Martí, Gema
dc.contributor.author
Ortega Villasclaras, Pablo Rafael
dc.contributor.author
Voz Sánchez, Cristóbal
dc.contributor.author
Martín García, Isidro
dc.contributor.author
Colina Brito, Mónica Alejandra
dc.contributor.author
Morales Vilches, Ana Belén
dc.contributor.author
Orpella García, Alberto
dc.contributor.author
Alcubilla González, Ramón
dc.identifier
López, G. [et al.]. Surface passivation and optical characterization of Al2O3/a-SiCx stacks on c-Si substrates. A: E-MRS Spring Meeting. "E-MRS 2013 Spring Meeting. Congres Center - Strasbourg, France May 27th - 31st, 2013". Strasbourg: 2013, p. 1.
dc.identifier
https://hdl.handle.net/2117/26822
dc.description.abstract
Postprint (published version)
dc.format
application/pdf
dc.rights
Restricted access - publisher's policy
dc.subject
Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
dc.subject
Nanoelectronics
dc.subject
Nanoelectrònica
dc.title
Surface passivation and optical characterization of Al2O3/a-SiCx stacks on c-Si substrates
